Micro-electromechanical systems (MEMS) have been around for more than two decades. The highest volumes of MEMS devices are sold as inkjet print cartridges and pressure sensors. Recently, high-resolution gyros and angular rate sensors have found application in handheld GPS systems and personal computers. MEMS devices are also found throughout various vehicle systems that control the fuel, engine, and airbag deployment. As with many other technologies, MEMS devices originally developed for the vehicle industry have found application elsewhere.