Micro-flow differential pressure sensors incorporate a thermal anemometer element and CMOS analog conditioning circuitry with a micro-flow channel having very high flow-impedance that allows accurate sensing of low differential pressures over a wide dynamic range. The flow-impedance is predefined at the die-level, requiring only 2.5 nl/sec of air flow, which dramatically relaxes demands on subsequent packaging operations, resulting in a smaller, lower-cost solution. The CMOS die itself consists of the sensor element, amplification and analog adjustability through the use of rejustors, enabling near zero TC-Span without digital compensation. Sensitivity is less than 0.1 Pascal, (0.004 inches of H2O), making the sensors ideal for detecting small changes in air flow for respiration and ventilation in medical applications; heating and cooling in industrial HVAC environments; and intrusion detection in secured environments.

For more information, visit: www.mbridgetech.com